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one-head dc magnetron sputtering deposition metal coating machine

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Product
one-head dc magnetron sputtering deposition metal coating machine
Posting date : Jul 17, 2020
Membership
Free Member Scince Jul 13, 2020
FOB Price
11000
Min. Order Quantity
1
Supply Abillity
50
Port
qingdao,shanghai,
Payment Terms
T/T, L/C, Pay Later,Western Union,VISA
Package
wooden box packaging
Keyword :
Category
Contact
jibin wang
Product Detail
Company Info
 
Quick Detail
Place of Origin
China [CN]
Brand Name
CYKY
Model Number
CY-MSP300S-DC
HS-CODE
8479-89
Package & Delivery Lead Time
Package
wooden box packaging
Delivery Lead Time
30 days
Detailed Description

Single target DC magnetron sputtering coater CY-MSP300S-DC

Single target DC magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable. The magnetron target head can be selected from 1 inch 2 inches 3 inches. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with 1500W high power DC power supply, which can be used for high energy metal sputter coating. Other specifications of DC or RF power supply can be selected to achieve coating operation of various materials.

 

The coating machine has a two-channel high precision mass flow meter. If customers have other requirements, the gas path of up to four-channel mass flow meter can be customized to meet the complex gas environment requirements. The instrument is equipped with advanced turbo molecular pump group, and ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency. This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.

Single target DC magnetron sputtering coater application:

This device can be used for preparing single-layer ferroelectric thin films, conductive films, alloy films, and the like. Compared with similar equipment, the single target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.

Single target DC magnetron sputtering coater technical parameters:

Sample stage

Size:φ185mm

Temperature   control accuracy:±1℃

365体育投注Heating temperature:Max 500℃

Rotate speed:1-20rpm adjustable

Magnetron Sputtering target head

2”×1 (1”,2”,3”, 4”optional)

365体育投注Circulating water chiller with flow rate of 10L/min

365体育投注Vacuum chamber

Chamber size:φ300mm×300mm

Watch window:φ100mm

Chamber material:Stainless steel

Opening mode:Top cover open

Mass flowmeter

365体育投注2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs)

365体育投注Vacuum system

365体育投注Model:CY-GZK103-A

365体育投注Pumping interface:KF40

Molecular pump:CY-600

Exhaust interface:KF16

Backing pump:rotary vane pump

365体育投注Vacuum measurement:Compound vacuum gauge

365体育投注Ultimate vacuum:1.0E-5Pa

Power supply:AC;220V 50/60Hz

365体育投注Pumping rate:Molecular pump: 600L/S    rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20   minutes

Power   configuration

DC power supply×1;Max output power:1500W

Other   parameters

Supply   voltage:AC220V,50Hz

365体育投注Overall  size:600mm×650mm×1280mm

Total power:3KW

365体育投注Total Weight:300kg

 


ECROBOT CO., Ltd, Business Registration Number : 220-88-71747, CEO Park Jae Woo, TEL : +82-2-552-7676, E-mail : info@unt-systems.com
Address : (Hwanghwa B/D 11F, Yeoksam-dong)320, Gangnam-daero, Gangnam-gu, Seoul, South Korea
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